Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Study on the optical properties of Mn-Co-Ni-O thin films deposited by magnetron sputtering

Open Access Open Access

Abstract

Mn-Co-Ni-O (MCNO) thin films have important applications. In this paper, we find that the free carrier model can satisfactorily explain the optical properties of MCNO thin films above 0.5 μm by analyzing the cutoff wavelength of Mn1.5Co1Ni0.5O4 thin film transmissivity with thickness of 2, 0.75, and 0.5 μm. The effect of the small polaron oscillation on the optical properties could be ignored in the range of 0.5~1.1 μm waveband. By analyzing the Raman spectra of Mn2Co0.7Ni0.3O4 thin films with 0.75 μm and 6.5 μm thickness, it shows that the Mn-Co-Ni-O thin film deposited on the amorphous Al2O3 substrate has compressive stress. For 6.5 μm Mn2Co0.7Ni0.3O4 thin film, the annealing treatment has little effect on the lattice vibrations, but it has a more obvious effect on the electron transition. Annealing can result in optical changes below 3.6 μm. The analyses of MCNO films with different components instruct that the first absorption edge of absorptivity is brought about by lattice resonance, the second one results from the absorption of the small polaron hopping in an excited state, and the third one is due to the resonant absorption of the small polaron hopping in the ground state.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

1. Introduction

Mn-Co-Ni-O (MCNO) thin films belong to AB2O4 cubic spinel structure with excellent semiconductor properties. They are often used as thermal sensors, surge protective devices and the property of negative temperature coefficient of resistance are often used as uncooled thermal infrared detectors [1–3]. As an important optoelectronic material, the optical mechanism of MCNO thin films is deficient and the researches mainly focus on the preparation or electrical properties [4–7]. G. Ji prepared Mn1.56Co0.96Ni0.48O4 thin films by using laser molecular beam epitaxy technique and the structural and electrical properties of the films have been investigated [8]. Y. Q. Gao prepared about 2 μm Mn1.56Co0.96Ni0.48O4 thin films by the chemical solution deposition method on a Al2O3 substrate and the mid-infrared optical properties of the films have been investigated by analyzing transmission spectra [9]. The spectroscopic ellipsmetric properties of MCNO thin films have been extensively studied in our former paper [10] and the research about transmission and absorption in this paper can motivate some new results which cannot be deduced by spectroscopic ellipsmetric analyses. These studies provide theoretical basis for improving the optoelectronic properties of MCNO films and facilitate to narrow the disparities between the MCNO infrared detectors and the refrigerated infrared detectors. Furthermore, the application of this film in the optical field will be promoted.

2. Experimental

MCNO thin films were deposited on amorphous Al2O3 substrates with thickness of ∼0.75 μm by the magnetron sputtering technique introduced in reference [11], and the components were separately Mn1.2Co0.7Ni1.1O4, Mn1.2Co1.2Ni0.6O4, Mn1.5Co1Ni0.5O4, Mn2Co0.7Ni0.3O4. Additionally, 2 μm Mn1.5Co1Ni0.5O4 and 6.5 μm Mn2Co0.7Ni0.3O4 thin films were also prepared by the same deposited method. Transmission and reflection were measured by FTIR spectrometer (Bruker 80V) and then the absorptivity was calculated for those films. The spectroscopic ellipsometry was measured by SC620 (Sanco Co., Inc.) in a range of 0.3~1.1 μm and the incident angles were 50° and 60°. The XPS (AXIS, Kratos) and Raman spectra (Renishaw) were measured for parts of the films.

3. Results and discussion

Our former research instructs that the macroscopic physical properties of MCNO thin films could be explained by the free carrier model [11]. Accordingly, for the incident light with a certain wavelength, the MCNO thin film definitely has a penetration depth with the same expression (Eq. (1)) to metallic substances [12].

d=λ2π1nk

Where d is the penetration depth, λ is the incident wavelength, n represents the refractivity, and k is the extinction coefficient. We take the intersection between the transmissivity curve and the zero axis as the cutoff position and the corresponding wavelength is λ(T0) (Fig. 1(a)). For 2, 0.75, and 0.5 μm Mn1.5Co1Ni0.5O4 thin films, their d values can be calculated and the results are separately 0.425 ± 0.006, 0.158 ± 0.002, and 0.109 ± 0.003 μm which are almost the same proportion to the thickness ratio (Fig. 1(b)). Therefore, we deduce that the free carrier model can explain the optical properties of MCNO thin films above 0.5 μm satisfactorily based on Eq. (1).

 figure: Fig. 1

Fig. 1 (a) Transmissivities of 2, 0.75, and 0.5 μm thicknesses of Mn1.5Co1Ni0.5O4 thin films in 0.54~1.1 μm waveband. The vertical marks denote the cutoff positions which are the intersections between the curves and the zero axis. The inset shows the cutoff wavelength changes with the film thickness, which indicates that thicker film corresponds to longer cutoff wavelength; (b) The film thickness and corresponding λ(T0) values. It can be seen that they are even the same ratios.

Download Full Size | PDF

Because the thicker film corresponds to a longer cutoff wavelength, it can be deduced that MCNO thin film should oversize certain thickness in order to reduce the loss of transmissivity. It also can be seen that the incremental thickness mainly contributes to longer-wavelength absorption (Fig. 1(a)).

For 0.75 μm MCNO thin films with different component ratios, their d values in the wavelength λ(T0) should be the same for those whose optical properties can be explained by free carrier model. The refractive index n and extinction coefficient k can be fitted by the point by point method (Fig. 2). Then their d values can be calculated according Eq. (1). It can be drawn from Table 1 that the d values are approximately equal with one another in the range of errors except for Mn2Co0.7Ni0.3O4 thin film because of its small cutoff wavelength. It means the effect of the small polaron oscillation on the optical properties cannot be ignored for Mn2Co0.7Ni0.3O4 thin film.

 figure: Fig. 2

Fig. 2 (a) Transmissivity in 0.55~1.1 μm waveband for 0.75 μm MCNO thin films. The 1, 2, 3, 4 numbers mark the cutoff wavelength λ(T0) whose values are listed in Table 1. The refractive index n (b) and extinction coefficient k (c) can be fitted by the point by point method.

Download Full Size | PDF

Tables Icon

Table 1. The values of cutoff wavelength λ(T0), refractive index n, extinction coefficient k and the deduced penetration depth d.

For MCNO films, the inner Mn3+ ion and its surrounding electron are affected by john-Teller distortion to form a small polaron [13]. In terms of energy band, the local state broadening for Mn3+, Mn4+ ions will produce low Hubbard and high Hubbard bands separately to form a Hubbard band gap [1, 13]. Due to the electron-phonon interaction, the electron jumps from Mn3+ to Mn4+. This brings about the small polaron hopping to produce a quasi-free electron during the jumping process. So, the number of Mn3+/Mn4+ ion pairs is proportional to the number of quasi-free electrons. The XPS analyses in Fig. 3 manifest that the number of Mn3+/Mn4+ ion pairs is 0.44 for Mn2Co0.7Ni0.3O4 thin film while the number for Mn1.2Co0.7Ni1.1O4 thin film is 0.49 [14]. The smaller number of Mn3+/Mn4+ ion pairs will produce less quasi-free electrons for Mn2Co0.7Ni0.3O4 thin film.

 figure: Fig. 3

Fig. 3 XPS-peak-differenations of Mn 2p3/2 level signals for (a) Mn1.2Co0.7Ni1.1O4 and (b) Mn2Co0.7Ni0.3O4 thin films.

Download Full Size | PDF

Additionally, the number of small polarons is determined by the Mn3+ ion number. The Mn3+ content of Mn2Co0.7Ni0.3O4 thin film (1.14) far outnumbers the one of Mn1.2Co0.7Ni1.1O4 thin film (0.59). Consequently, the small polaron oscillation plays a more important part to be not ignored for Mn2Co0.7Ni0.3O4 film with bigger Mn3+ ion number, which can also explain the decreased cutoff wavelength with growing Mn ion content in Table 2.

Tables Icon

Table 2. Percentages of Mn3+, Mn4+ ions for Mn2Co0.7Ni0.3O4, Mn1.2Co0.7Ni1.1O4 thin films and numbers of Mn3+ ion (n1), Mn3+/Mn4+ pairs (n2).

We prepared 6.5 μm Mn2Co0.7Ni0.3O4 thin films and annealed them under 400 °C, 500 °C, 600 °C, 800 °C separately [10]. Figure 4(a) indicates that the annealing treatment enlarges the cutoff wavelengths (correspondingly 1.86, 1.865, 1.87, and 1.88 μm). It is mainly due to the enlarged Mn3+/Mn4+ pair number resulting from the transmission of Co2+ ions to the octahedron with increasing annealing temperature for the MCNO thin films with cubic spinel structure [13]. As a result, the enlarged Mn3+/Mn4+ pair number will increase the number of hopping small polarons to produce more quasi-free electrons, and then the number of oscillating small polarons will decrease. It has been demonstrated in other references that the absorption edge at around 2 μm results from the resonance absorption by the small polaron hopping [11]. This theory works on these cutoff wavelengths. As the wavelength increasing, the function of the incident wave on the small polaron hopping will become weaker and weaker, and then the absorption will be mainly caused by the intraband transition of the small polaron. The onsets of absorption for the samples are around 4.7 μm (Fig. 4(b) inset). So it can be deduced that the energy of intraband transition must surpass 0.26 eV. For the wavelength over 3.6 μm, the transmissivity are almost unchanged under different annealing temperatures in Fig. 4(b), which means that annealing treatment only affects optical properties at less than 3.6 μm.

 figure: Fig. 4

Fig. 4 (a) Transmissivity spectra of samples annealed at unannealed, 400 °C, 500 °C, 600 °C, 800 °C separately for 6.5 μm Mn2Co0.7Ni0.3O4 thin film within 1.8~2.2 μm waveband;(b) Transmissivity spectra of samples annealed at 400 °C, 800 °C within 1.7~5.4 μm waveband. The waves are caused by optical interference of film thickness. The scatters almost coincide with the line above 3.6 μm wave. The inset is absorptivity spectrum of 400 °C annealed sample. The onset of absorption begains at 4.7 μm.

Download Full Size | PDF

At room temperature (300 K), the thermal energy of electron is 0.026 eV (kBT) which is much more less than the intraband transition energy. So, the ambient temperature can be considered as perturbation to be ignored. When the frequency of optical branch in lattice vibration spectrum is the same to the incident electromagnetic frequency, the strong coupling absorption for incident wave occurs. For 4.7 μm, the electromagnetic frequency is 3.98 × 1014 rad/s and it should correspond to lattice vibration [15]. The eigenvalue of phonon energy can be expressed as En = (n + 1/2)ћωq, (n = 0,1,2…. and ωq representing phonon frequency). Since the bound electron in small polaron only interacts with the lattice wave, there must exists an energy transfer with ћωq as one unit and the value is 0.26 eV which leads to the intraband transition for the electron in small polaron. Figure 5(a) is the XRD patterns of unannealed and 800 °C annealed samples. The lattice parameters can be calculated to be 8.3492 Å and 8.2700 Å respectively according to the (400) diffraction peaks. Deductively, the lattice vibration frequency (or the lattice vibration energy) only changes about 0.95%, which indicates that annealing even has no obvious effect on the frequency of lattice vibration. For 6.5 μm Mn2Co0.7Ni0.3O4 thin films annealed at different temperatures, their absorptivities in 3.6~4.7 μm are even out of relation with annealing temperature. So, the absorption in 3.6~4.7 μm waveband is brought about by the lattice resonance absorption. Comparably, there exists a more obvious differentiation for the absorptivity below 3.6 μm which indicates a role played by annealing treatment on the electronic resonance frequency.

 figure: Fig. 5

Fig. 5 6.5 μm Mn2Co0.7Ni0.3O4 thin film: (a) XRD patterns of unannealed and 800 °C annealed samples; (b) Raman spectra comparison with 0.75 μm Mn2Co0.7Ni0.3O4 thin film.

Download Full Size | PDF

The above results can also explain the thinner MCNO films with different components. Figure 6 shows that the first absorptivity edge λ1 is about 4.5 μm which is brought about by the lattice resonance absorption for 0.75 μm MCNO films and smaller than the absorptivity edge of 6.5 μm Mn2Co0.7Ni0.3O4 thin film (4.8 μm). From Raman spectra in Fig. 5, it can be gotten that Raman active vibrational modes locate around 551 cm−1 and 547 cm−1 respectively and they are both brought about by Mn-O ion clusters [1]. The comparison shows that the thicker film has a smaller Raman shift. It can be deduced that the MCNO thin films deposited on amorphous Al2O3 have compressive stress near the interface, and the stress will decrease with growing thickness. The compressive stress will also result in a higher lattice resonance frequency (i.e. lower λ1 value) for 0.75 μm MCNO films. Because the intraband transition of the electron in small polaron due to the energy transfer of lattice vibration puts the small polaron in excited state, it is reasonable to suppose that the second absorptivity edge λ2 resulting from the resonance absorption of electrons corresponds to the hopping of the small polaron in excited state consequently. According to the former analyses, the upper part of the film mainly assimilates shorter wavelengths, and so the compressive stress of the film has little effect on the shortwave absorption. As a result, it is reasonable to take 0.26 eV as the transferred lattice energy just like thick MCNO films. Then the resonance frequency ωe of the small polaron in ground state can be calculated by adding up the electronic thermal energy 0.026 eV, the transferred lattice energy 0.26 eV and the excited energy corresponding λ2 points together and ћωe is the ionization energy of small polaron (Table 3). The resonance wavelengths λe of the small polaron hopping from ground state to quasi-free state for Mn1.2Co0.7Ni1.1O4, Mn1.2Co1.2Ni0.6O4, Mn2Co0.7Ni0.3O4 thin films can be calculated to be successively 1.56 ± 0.05, 1.54 ± 0.04, and 1.59 ± 0.04 μm, which even coincide with the third absorptivity edge λ3 values 1.59, 1.57, and 1.62 μm within the range of errors.

 figure: Fig. 6

Fig. 6 Absorptivity spectra of Mn1.2Co0.7Ni1.1O4, Mn1.2Co1.2Ni0.6O4 and Mn2Co0.7Ni0.3O4 thin films. The λ1, λ2, λ3 values denote three absorptivity edges separately. The enlarged views of λ1(Mn1.2Co1.2Ni0.6O4), λ3 values are displayed in the insets for more clear show. The λ2 values correspond the inflection points of curves and the ranges of errors are marked with coarse pink lines.

Download Full Size | PDF

Tables Icon

Table 3. λ1, λ2, λ3 values, ionization energy ћωe of small polaron, resonance frequency ωe and coupling wavelengths λe of the small polaron in ground state. The values in parentheses are the energies separately corresponding λ1, 4.7 μm waves and thermal energy at room temperature.

4. Conclusions

In summary, we have analyzed the cutoff wavelengths of 2, 0.75, and 0.5 μm thickness of Mn1.5Co1Ni0.5O4 thin films and demonstrated the free carrier model can well explain the optical properties of MCNO thin films above 0.5 μm without considering the small polaron oscillation. The study of MCNO thin films with different components shows that the small polaron oscillation cannot be ignored with increasing Mn ion content. Consequently, the cutoff wavelengths of most MCNO films are above 0.5 μm except for that of Mn2Co0.7Ni0.3O4 thin film which has more small polarons. The comparison of Raman spectra of Mn2Co0.7Ni0.3O4 thin films with the thickness of 0.75 μm and 6.5 μm indicates that the MCNO thin films deposited on amorphous Al2O3 have compressive stress. For 6.5 μm thickness of Mn2Co0.7Ni0.3O4 thin films underwent annealing treatment, it is lattice resonance absorption coupling with incident electromagnetic wave in 3.6~4.7 μm waveband and annealing has no obvious effect on the lattice resonance frequency. However, the electronic resonance frequency suffers remarkable influence of annealing treatment. The spectra analysis of MCNO films with different components instructs that the first absorption edge of absorptivity is brought about by lattice resonance, the second one results from the absorption hopping of the small polaron in the excited state and the third one is due to absorption hopping of the small polaron in the ground state.

Funding

National Science Fund for Distinguished Young Scholars (61625505); China Postdoctoral Science Foundation (2018M632014); Shanghai Projects (Grant Nos. 16JC1403400, 15ZR1445700, and 17ZR1444100) in China.

References and links

1. R. Dannenberg, S. Baliga, R. J. Gambino, A. H. King, and A. P. Doctor, “Resistivity, thermopower and the correlation to infrared active vibrations of Mn1.56 Co0.96 Ni0.48 O4 spinel films sputtered in an oxygen partial pressure seriesJ,” J. Appl. Phys. 86(1), 514–523 (1999). [CrossRef]  

2. S. Baliga and A. L. Jain, “Hopping conduction in sputtered Ni-Co-Mn-O spinel films,” Mater. Lett. 11(5-7), 226–228 (1991). [CrossRef]  

3. S. Karanth, M. A. Sumesh, V. Shobha, H. G. Shanbhogue, and C. L. Nagendra, “Infrared detectors based on thin film the thermistor of ternary Mn-Co-Ni-O on micro-machined thermal isolation structure,” Sens. Actuators A Phys. 153(1), 69–75 (2009). [CrossRef]  

4. Y. Q. Gao, Z. M. Huang, Y. Hou, J. Wu, Y. J. Ge, and J. H. Chu, “Optical properties of Mn1.56Co0.96Ni0.48O4 films studied by spectroscopic ellipsometry,” Appl. Phys. Lett. 94(1), 011106 (2009). [CrossRef]  

5. T. Yokoyama, Y. Abe, T. Meguro, K. Komeya, K. Kondo, S. Kaneko, and T. Sasamoto, “Preparation and electrical properties of sintered bodies composed of monophase spinel Mn(2-X)Co2XNi(1-X)O4 (0\LeqX\Leq1) derived from rock-salt-type oxides,” Jpn. J. Appl. Phys. 35(1), 5775–5780 (1996). [CrossRef]  

6. Y. Abe, T. Meguro, S. Oyamatsu, T. Yokoyama, and K. Komeya, “Formation region of monophase with cubic spinel-type oxides in Mn-Co-Ni ternary system,” J. Mater. Sci. 34(19), 4639–4644 (1999). [CrossRef]  

7. W. X. Cheng, A. L. Ding, P. S. Qiu, X. Y. He, and X. S. H. Zheng, “Optical and dielectric properties of highly oriented (Zr0.8,Sn0.2)TiO4 thin films prepared by rf magnetron sputtering,” Appl. Surf. Sci. 214(1-4), 136–142 (2003). [CrossRef]  

8. Y. Q. Gao, Z. M. Huang, Y. Hou, J. Wu, W. Zhou, L. B. Zhang, and J. H. Chu, “Infrared optical properties of Mn1.56Co0.96Ni0.48O4 thin films prepared by chemical solution deposition,” Appl. Phys., A Mater. Sci. Process. 114(3), 829–832 (2014). [CrossRef]  

9. G. Ji, A. M. Chang, J. B. Xu, H. M. Zhang, J. Hou, B. Zhang, and P. J. Zhao, “Low-temperature (﹤300 °C) growth and characterization of single-[100]-oriented Mn–Co–Ni–O thin films,” Mater. Lett. 10, 103–1067 (2013). [CrossRef]  

10. F. Zhang and Z. Huang, “Spectroscopic ellipsometric properties of annealed Mn1.95Co0.77Ni0.28O4 thin films,” Opt. Lett. 42(19), 3836–3839 (2017). [CrossRef]   [PubMed]  

11. F. Zhang, W. Zhou, C. OuYang, J. Wu, Y. Q. Gao, and Z. M. Huang, “Annealing effect on the structural and electrical performance of Mn-Co-Ni-O films,” AIP Adv. 5, 117137 (2015). [CrossRef]  

12. K. Khaled and J. W. Richard, “Optical transmission and reflection spectroscopy of single quantum dots,” Superlattices Microstruct. 33, 311–337 (2003). [CrossRef]  

13. R. Schmidt, A. Basu, and A. W. Brinkman, “Small polaron hopping in spinel manganates,” Phys. Rev. B 72(11), 115101 (2005). [CrossRef]  

14. F. Zhang, J. Wu, C. OuYang, W. Zhou, Y. Q. Gao, and Z. M. Huang, “ Effect of cation distribution on structural and electrical properties of MnxCoyNi3-x-yO4 thin films,” J. Infrared Millim. W. 4, 144–148 (2017).

15. K. Huang, Solid State Physics (High Education Press, 1988).

Cited By

Optica participates in Crossref's Cited-By Linking service. Citing articles from Optica Publishing Group journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1 (a) Transmissivities of 2, 0.75, and 0.5 μm thicknesses of Mn1.5Co1Ni0.5O4 thin films in 0.54~1.1 μm waveband. The vertical marks denote the cutoff positions which are the intersections between the curves and the zero axis. The inset shows the cutoff wavelength changes with the film thickness, which indicates that thicker film corresponds to longer cutoff wavelength; (b) The film thickness and corresponding λ(T0) values. It can be seen that they are even the same ratios.
Fig. 2
Fig. 2 (a) Transmissivity in 0.55~1.1 μm waveband for 0.75 μm MCNO thin films. The 1, 2, 3, 4 numbers mark the cutoff wavelength λ(T0) whose values are listed in Table 1. The refractive index n (b) and extinction coefficient k (c) can be fitted by the point by point method.
Fig. 3
Fig. 3 XPS-peak-differenations of Mn 2p3/2 level signals for (a) Mn1.2Co0.7Ni1.1O4 and (b) Mn2Co0.7Ni0.3O4 thin films.
Fig. 4
Fig. 4 (a) Transmissivity spectra of samples annealed at unannealed, 400 °C, 500 °C, 600 °C, 800 °C separately for 6.5 μm Mn2Co0.7Ni0.3O4 thin film within 1.8~2.2 μm waveband;(b) Transmissivity spectra of samples annealed at 400 °C, 800 °C within 1.7~5.4 μm waveband. The waves are caused by optical interference of film thickness. The scatters almost coincide with the line above 3.6 μm wave. The inset is absorptivity spectrum of 400 °C annealed sample. The onset of absorption begains at 4.7 μm.
Fig. 5
Fig. 5 6.5 μm Mn2Co0.7Ni0.3O4 thin film: (a) XRD patterns of unannealed and 800 °C annealed samples; (b) Raman spectra comparison with 0.75 μm Mn2Co0.7Ni0.3O4 thin film.
Fig. 6
Fig. 6 Absorptivity spectra of Mn1.2Co0.7Ni1.1O4, Mn1.2Co1.2Ni0.6O4 and Mn2Co0.7Ni0.3O4 thin films. The λ1, λ2, λ3 values denote three absorptivity edges separately. The enlarged views of λ1(Mn1.2Co1.2Ni0.6O4), λ3 values are displayed in the insets for more clear show. The λ2 values correspond the inflection points of curves and the ranges of errors are marked with coarse pink lines.

Tables (3)

Tables Icon

Table 1 The values of cutoff wavelength λ(T0), refractive index n, extinction coefficient k and the deduced penetration depth d.

Tables Icon

Table 2 Percentages of Mn3+, Mn4+ ions for Mn2Co0.7Ni0.3O4, Mn1.2Co0.7Ni1.1O4 thin films and numbers of Mn3+ ion (n1), Mn3+/Mn4+ pairs (n2).

Tables Icon

Table 3 λ1, λ2, λ3 values, ionization energy ћωe of small polaron, resonance frequency ωe and coupling wavelengths λe of the small polaron in ground state. The values in parentheses are the energies separately corresponding λ1, 4.7 μm waves and thermal energy at room temperature.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

d = λ 2 π 1 n k
Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.