Abstract
We report the first demonstration of a silicon photonic microring modulator with modulation data rate up to 128 Gb/s (64 Gbaud PAM4). The microring modulator exhibits an electro-optic phase efficiency of V
$_\pi \cdot$
L = 0.52 V
$\cdot$
cm, an electro-optic bandwidth of 50 GHz, and a measured transmitter dispersion eye closure quaternary of 3.0 dB at this data rate. In addition, the resonant wavelength of the microring modulator can be tuned across a full free spectral range using an integrated heater with a thermo-optic phase efficiency of 19.5 mW
$/\pi$
-phase shift.
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