Abstract
Conventionally a line defect in the photonic crystal (PhC)
is used to create a waveguide for light propagation through the PhC. A PhC
based filter is designed by introducing micro-cavities within the line defect
so as to form the resonant bandgap structure for PhC. Such a PhC waveguide
(PhCWG) filter shows sharp resonant peak in output wavelength spectrum. We
proposed a suspended silicon bridge structure comprising this PhCWG filter
structure. Since the output resonant wavelength is sensitive to the shape
of air holes and defect length of the micro-cavity. Shift of the output resonant
wavelength is observed for suspended PhCWG beam structure under particular
force loading. In other words, the induced strain modifies the shape of air
holes and the spacing among them. Such an effect leads to shift of resonant
wavelength. Under optical detection limitation of 0.1 nm for resonant wavelength
shift, the sensing capability of this nanomechanical sensor is derived as
that vertical deformation is 20–25 nm at the center and the smallest
strain is 0.005% for defect length. This innovative design conceptualizes
a new application area for PhCs, i.e., the nanometer-scale physical sensors
for strains and forces.
© 2008 IEEE
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