Abstract
Abstract—In this paper, we study the Ion-beam (IB) irradiated
amorphous (a)-aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) inorganic layer deposited
by RF magnetron sputtering as an liquid crystal (LC) alignment
layer. Uniformly vertical-aligned (VA)-LC on a-Al<sub>2</sub>O<sub>3</sub> surface
resulted from IB irradiation energy above 1800 eV. We assumed
that LC molecular orientation depends on the intensity of Al 2p,
O 1s peaks, which were confirmed through X-ray photoelectron
spectroscopy (XPS) measurements. XPS showed that IB irradiation
changed the chemical structure, breaking Al-O bonds by
altering Al–O and O–Al bonding intensity. Also, electro-optical
characteristics of vertical-aligned-LC displays (VA-LCDs) on the
Al<sub>2</sub>O<sub>3</sub> alignment layers were measured, which showed reduced
threshold voltage and power consumption, as compared with IB
irradiated and rubbed polyimide (PI) layers.
© 2011 IEEE
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