Abstract
For conventional active-matrix organic light-emitting diode
(AMOLED) flat panel displays, low temperature poly-silicon thin-film
transistor (LTPS TFT) on rigid glass substrate process has already
been well established. However, this technology cannot be applied
directly on polyimide (PI) substrate for flexible display. This is
because PI has the different coefficient of thermal expansion (CTE)
from the glass, which will result in PI film peeling-off and/or warpage
issues under conventional LTPS-TFT process technology. In this paper,
a process flow of LTPS TFT on PI substrate for flexible display application
was discussed. A flexible display demo system was successfully made
by optimizing the LTPS TFT process.
© 2015 IEEE
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