Abstract
During the manufacturing processes of the thin-film transistor
liquid-crystal display (TFT-LCD) panel, red, green, and blue (RGB) color filter
coatings undergo the layer-adding process which causes the rough surfaces
between the layers. The rough surfaces make acquiring an accurate measurement
of the optical properties and thickness
$(n, k, d)$
much more difficult because the
scattering effects occur. The effective layer-included model is considered
in determining the
$(n,
k, d)$
by including effective layers to reside between and
above the multilayer (ML). To show the feasibility of the effective layer-included
model, we examined the model by fitting the
$(n, k, d)$
for different virtual systems
which contain different kinds of scatters reside between and above it. Our
findings show that the fitted
$(n,
k, d)$
can be closer to the assumed
$(n, k, d)$
by using the effective layer-included
model rather than the standard model. Also, the tolerance of initial assigned
$(n, k, d)$
regions
to obtain the accurate results are investigated. Further, both models are
used to determine the
$(n,
k, d)$
of the fabricated RGB color filter samples. In the
experimental measurements, all reflection and transmission signals are measured
by utilizing the in-house variable angle spectroscopic ellipsometry (VASE)
system. Consequently, the thicknesses determined from effective layer-included
model are closer to the thicknesses measured from profilometry (Alpha-step
100). Also, the transmissions under 0
$^{\circ}$
, 15
$^{\circ}$
, and 30
$^{\circ}$
illuminations calculated from the fitted
$(n, k, d)$
through the effective layer-included
model are closer to the VASE measurements rather than the standard model for
each sample. We conclude that the effective layer-included model can be used
to determine the accurate
$(n,
k, d)$
of RGB color filter coatings with rough surface.
© 2013 IEEE
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