Abstract
Analysis of glass homogeneity using the attaching interferometric data model neglects
body distribution. To improve analysis accuracy, we establish the three-dimensional gradient index
(GRIN) model of glass index by analyzing fused silica homogeneity distribution in two perpendicular
measurement directions. Using the GRIN model, a lithography projection lens with a numerical
aperture of 0.75 is analyzed. Root mean square wavefront aberration deteriorates from 0.9 to 9.65 nm
and then improves to 5.9 nm after clocking.
© 2013 Chinese Optics Letters
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