Abstract
A temperature-compensated fiber optic Fabry-Perot accelerometer (FOFPA) formed by
symmetrically bonding an all-silica in-line fiber Fabry-Perot etalon (ILFFPE) and a piezoelectric
ceramic unimorph actuator (PCUA) to two surfaces of a silica cantilever is reported. The all-silica
ILFFPE with feedback-controlled cavity length by the PCUA simultaneously senses acceleration and
temperature. The results indicate that the fabricated FOFPA system simultaneously senses
acceleration and temperature with active temperature compensation. The nonlinearity of the output
voltage to acceleration is less than 0.65%. The nonlinearity of the control voltage to temperature
is 1.75%. Furthermore, the maximum deviation of the sensitivity with temperature compensation at a
temperature range from 25 to 50 oC is 0.025 V/g.
© 2013 Chinese Optics Letters
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