Abstract
InGaAs/GaAs vertical-cavity surface-emitting lasers (VCSELs) are fabricated by a thermal
selective wet-oxidation confinement technique. Post-oxidation annealing in a nitrogen environment at
high temperatures is then conducted to improve the performance of the oxide-confined InGaAs/GaAs
VCSELs. The optimum post-oxidation annealing conditions are determined by changing the furnace
temperature and annealing time. Compared with a unannealed laser device, the light output power
increases by about 12%. An aging test is carried out to examine the reliability of the annealed
oxide-confined VCSEL device. The temperature dependence of the lasing wavelength of the annealed
oxide-confined VCSELs is also investigated.
© 2012 Chinese Optics Letters
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