Abstract
This paper reports a non-coplanar misalignment optical waveguide cantilever sensor realizing a monotonic response with a large operation range. A ${1} \times {2}$ Y-branch optical power splitter cantilever structure was designed, and one of the branches was reduced in thickness at the end, as a non-coplanar structure with respect to another. The misalignment coupling of the two branches due to the thickness of one branch leads to a monotonic response of an optical waveguide cantilever sensor. The simulation results showed a monotonic response with a sensitivity of ${6} \times {{10}^{- 4}}\;{{\rm nm}^{- 1}}$ in a large operation range of ${-}{1}$ to 1 µm.
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