Abstract
Planar polishing is an important manufacturing process for high-precision planar components. In this study, a real-time dresser and a planar polishing process based on real-time dressing for large-aperture optical plane components were developed. Efficient dressing of a polishing pad surface can be achieved with the real-time dresser. Compared with the conventional method, real-time correction for the surface shape of the polishing pad was realized via the temperature parameter $t$ in the real-time dresser, and this parameter can be optimized through optimization experiments. Finally, a series of experiments was carried out to verify the effectiveness of the real-time dresser on surface dressing. Through the real-time dressing of the polishing pad surface, the flatness peak–valley deviation and the root-mean-square deviation of the flat optical element surface (${{430}} \times {{430}}\;{\rm{mm}}$) can reach ${{3}}\;\lambda$ and ${0.9}\;\lambda$, which is improved by 25% and 33%, respectively.
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