Abstract
This paper presents a new method for radius of curvature measurement by interferometers. The radius measurement is carried out directly in the interferometer confocal position without the need for a specific hardware and thus allows us to measure a much more diverse range of optical surfaces than standard methods. The method is based on measuring a number of phase maps and displacements at several steps through the confocal null position. Radius of curvature is then computed as the tangent slope of the measured defocus–displacement pair values in the confocal position. A relative accuracy of the method is approximately 0.05%, which makes the method suitable for a vast number of applications. Results of the method are verified using standard confocal cat’s eye technique.
© 2021 Optical Society of America
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