Abstract
We present the design, fabrication, and characterization of a one-dimensional photonic crystal (1D-PhC) low-index-mode nanobeam cavity on the silicon-on-insulator platform for refractive index sensing at the 2 μm wavelength band. A -factor of and an effective mode volume of are theoretically achieved. The measured transmission spectrum of the device immersed in NaCl solutions with different mass concentrations demonstrates a sensitivity of 326.1 nm/RIU and a -factor of .
© 2019 Optical Society of America
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