Author Affiliations
Olaf Stenzel,1,*
Steffen Wilbrandt,1
Mark Schürmann,1
Norbert Kaiser,1
Henrik Ehlers,2
Mathias Mende,2
Detlev Ristau,2
Stefan Bruns,3
Michael Vergöhl,3
Markus Stolze,4
Mario Held,5
Hansjörg Niederwald,6
Thomas Koch,6
Werner Riggers,7
Peer Burdack,8
Günter Mark,9
Rolf Schäfer,10
Stefan Mewes,11
Martin Bischoff,11
Markus Arntzen,12
Frank Eisenkrämer,13
Marc Lappschies,14
Stefan Jakobs,14
Stephan Koch,15
Beate Baumgarten,15
and Andreas Tünnermann1,16
1Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Strasse 7, 07745 Jena, Germany
2Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
3Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder Weg 54E, 38108 Braunschweig, Germany
4Umicore Thin Film Products AG, Alte Landstrasse 8, 9496 Balzers, Liechtenstein
5Bte Bedampfungstechnik GmbH, Am Ganzacker 2, 56479 Elsoff, Germany
6Carl Zeiss Jena GmbH, Carl-Zeiss-Strasse 22, 73447 Oberkochen, Germany
7Laseroptik GmbH, Gneisenaustrasse 14, 30826 Garbsen, Germany
8InnoLight GmbH, Garbsener Landstrasse 10, 30419 Hannover, Germany
9Melec GmbH, Moritzenmatten 21, 77815 Bühl, Germany
10robeko, Ackerwiese 14, 67728 Münchweiler, Germany
11Qioptiq Photonics GmbH & Co. KG, Königsallee 23, 37081 Göttingen, Germany
12Arcon II Flachglasveredelung GmbH & Co. KG, Schorba 4, 07751 Bucha, Germany
13Leica Microsystems CMS GmbH, Ernst-Leitz-Strasse 17-37, 35578 Wetzlar, Germany
14Optics Balzers Jena GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany
15Berliner Glas KGaA Herbert Kubatz GmbH & Co., Waldkraiburger Strasse 5, 12347 Berlin, Germany
16Friedrich-Schiller-University, Institute of Applied Physics, Max-Wien-Platz 1, 07743 Jena, Germany
*Corresponding author: olaf.stenzel@iof.fraunhofer.de