Abstract
Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function.
© 2010 Optical Society of America
Full Article | PDF ArticleMore Like This
Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan
Opt. Express 14(11) 4662-4667 (2006)
Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan
Appl. Opt. 45(34) 8636-8640 (2006)
Daesuk Kim, Soohyun Kim, Hong Jin Kong, and Yunwoo Lee
Opt. Lett. 27(21) 1893-1895 (2002)