Abstract
We present what is to our knowledge the first demonstration of a potentially low-cost refractive-index sensor based on UV processing. A channel waveguide and a Bragg grating are defined in a single UV processing step, resulting in a buried structure with a well-defined grating period. A subsequent wet etch process located over the Bragg grating opens a sensing window in the device and reveals the grating structure. Sensitivity of as much as 5 × 10−6 was inferred from our device.
© 2005 Optical Society of America
Full Article | PDF ArticleMore Like This
Valeria Maselli, Jason R. Grenier, Stephen Ho, and Peter R. Herman
Opt. Express 17(14) 11719-11729 (2009)
Xianfeng Chen, Kaiming Zhou, Lin Zhang, and Ian Bennion
Appl. Opt. 44(2) 178-182 (2005)
C. Sima, J. C. Gates, H. L. Rogers, P.L. Mennea, C. Holmes, M. N. Zervas, and P. G. R. Smith
Opt. Express 21(13) 15747-15754 (2013)