Abstract
The fabrication and experimental investigation of a miniature optical fiber pressure sensor for biomedical and industrial applications are described. The sensor measures only 125 µm in diameter. The essential element is a thin polymer diaphragm that is positioned inside the hollow end of an optical fiber. The cavity at the fiber end is made by a simple and effective micromachining process based on wet etching in diluted HF acid. Thus a Fabry–Perot interferometer is formed between the inner fiber–cavity interface and the diaphragm. The fabrication technique is described in detail. Different sensor prototypes were fabricated upon 125 µm-diameter optical fiber that demonstrated pressure ranges from 0 to 40 and from 0 to 1200 kPa. A resolution of less than 10 Pa was demonstrated in practice. The fabrication technique presented facilitates production of simple and low-cost disposable pressure sensors by use of materials with that ensure the required biocompatibility.
© 2005 Optical Society of America
Full Article | PDF ArticleMore Like This
Denis Donlagic and Edvard Cibula
Opt. Lett. 30(16) 2071-2073 (2005)
Fengyuan Liu, Sufen Ren, Guanjun Wang, Xiaoshu Cai, and Tianyi Cai
Appl. Opt. 63(7) 1744-1752 (2024)
Wenhui Wang, Nan Wu, Ye Tian, Christopher Niezrecki, and Xingwei Wang
Opt. Express 18(9) 9006-9014 (2010)