Abstract
The normal-incidence reflectance of high-density cast silicon carbide
(SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. High
reflectivity in the EUV is achieved. High reflectivity and the relatively
low-cost manufacturing process make high-density cast SiC a promising mirror
material for EUV applications.
© 1997 Optical Society of America
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