Abstract
A new interferometer for calibration of graduated line scales is described. It uses a novel method for observation of the distance between the graduation lines. The line images are recorded by a moving microscope and a CCD camera. A frame-grabber unit is used to digitize the images. We calculated the position of the microscope at the moment of charging the video fields by the use of digitized interference and video-synchronization signals. For elimination of the effect of carriage rotations, the focus point of the microscope and the apex of the main-arm cube-corner reflector are adjusted to the same point. The measurement and the analysis processes are completely automated. The estimated overall uncertainty (1σ) for a 1-m Invar scale is 44 nm.
© 1994 Optical Society of America
Full Article |
PDF Article
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Tables (1)
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Equations (1)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription