Abstract
A summary of the rapid high resolution full field ellipsometric imaging technique termed dynamic imaging microellipsometry is presented. The theoretical basis of a linear sensitivity coefficient approach to the coupling of individual error sources to ellipsometric absolute error is derived. Numerically computed sensitivity coefficient maps are presented with a discussion of their application to ellipsometric data calibration. An analysis of random error is presented and verified using comparisons between the theoretical estimations and system measurements.
© 1989 Optical Society of America
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