Abstract
The aspects of the use of dioptric optics for DUV microscopy are considered. The transition to the NUV and DUV range can significantly improve the resolving power of the microscope. Different kinds of crystals can be used as optical materials.
© 2018 The Author(s)
PDF ArticleMore Like This
Atsuo Osawa, Kyohei Fukuda, and Kouji Hirata
LTuE4 International Lens Design (IODC) 1990
Willi Ulrich and Hans-Jürgen Rostalski
IMD3 International Optical Design Conference (IODC) 2002
A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlhaas, M. Marsi, M. Trovo, R. Walker, D. Garzella, M.E. Couprie, P. Torchio, M. Alvisi, and C. Amra
ThB3 Optical Interference Coatings (OIC) 2001