Abstract
In optical coatings, one type of periodic multilayers is G((C1 A/2) (C2 B) (C1 A/2)) KM. Conventional interference edge filters are constructed when C1 = C2. The interference edge multilayers with unequal thickness are constructed when C1 ≠ C2. Such a multilayer system can be used as the narrow-band rejection filters, multi-frequency high reflectance coatings(1) and dichroic beam splitters. For the third case, both polarization effect and angular sensitivity are small when the light beam is incident with tilted angles. Therefore, its performance will be improved. Based on the literature(2), this paper describes a monitoring technology, the Level Method, which is suitable for monitoring periodic multilayers.
© 1984 Optical Society of America
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