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Wafer-level fabrication of vacuum-gap Fabry-Pérot resonators with quality factors exceeding one billion

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Abstract

We present a wafer-level fabrication method for high-Q, compact vacuum-gap Fabry-Pérot resonators. With quality factors surpassing one billion at 1560 nm, these resonators are well-suited in a range of applications as frequency references.

© 2024 The Author(s)

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