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Conferences > HILAS > 2012 > JT2A > JT2A.46

Saturation behaviour of femtosecond laser ablation in silicon-on-insulator

H. Zhang, D. van Oosten, D. M. Krol, and J. I. Dijkhuis

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Abstract

Sub-micron single-shot ablation features produced by femtosecond laser pulses have been investigated in silicon-on insulator with atomic force microscopy. The results are fitted with a simple model that includes secondary absorption in the laser-induced plasma.

© 2012 Optical Society of America

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