Thermoreflectance Microscope and Applications

Ki Soo Chang; Dong Uk Kim; Kwan Seob Park; Chan Bae Jeong; Geon Hee Kim

doi:10.1364/CLEO_AT.2016.JTh2A.8

Conference on Lasers and Electro-Optics
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper JTh2A.8
•https://doi.org/10.1364/CLEO_AT.2016.JTh2A.8

Thermoreflectance Microscope and Applications

Ki Soo Chang, Dong Uk Kim, Kwan Seob Park, Chan Bae Jeong, and Geon Hee Kim

CLEO: Applications and Technology 2016

San Jose, California United States
5–10 June 2016
ISBN: 978-1-943580-11-8

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Poster Session - Thursday (JTh2A)

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K. S. Chang, D. U. Kim, K. S. Park, C. B. Jeong, and G. H. Kim, "Thermoreflectance Microscope and Applications," in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper JTh2A.8.

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Abstract

We demonstrate a thermoreflectance microscope system and their applications, such as surface temperature measurement of semiconductor devices, hot spot detection for failure analysis of integrated circuits, and detection of defects in optical materials for high power laser.

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