Abstract
We have demonstrated an approach to prepare ultrasensitive surface enhanced Raman scattering (SERS) substrate via depositing Ag over silica (SiO2) nanospheres array template by magnetron sputtering. The nanospheres self-assembled on slightly-tilted silicon (Si) substrate with low-temperature thermal treatment. Large-area uniform Ag nanoclusters array was obtained with 40nm Ag covered the nanospheres (360nm in diameter). Ultrasensitivity was verified by successfully detection of Rhodamine 6G (R6G) with a limit of 10−11M.
© 2017 Optical Society of America
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