Abstract
This paper presents a thermally tunable narrow-band silicon waveguide Bragg grating filter with low power consumption, fast response and relatively high mechanical strength. A narrow bandwidth of around 2.0 nm is realized by employing misaligned sidewall Bragg gratings. Enhanced power efficiency of 290 pm/mW is achieved by an air trench beneath the waveguide acting as a thermal isolator. Periodic lateral tethers and anchors are utilized to increase the mechanical strength and reduce the response time (82 μs for rise time and 54 μs for fall time). The excellent properties of the proposed device enable potential applications in silicon photonic integrated circuits.
© 2018 The Author(s)
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